Micropatterning of Pb(Zr_0.52Ti_0.48)O₃ (PZT) thin films with line features as small as
350 nm was demonstrated through capillary molding of organometallic solutions within
the continuous channels of an elastomeric mold. Despite the large stresses that develop
during the evaporation of the solvent, pyrolysis of the organics, and the densification
and crystallization of the inorganic gel, the patterned crystalline PZT films were
crack-free and mechanically robust. Flawless regions as large as 1 cm2 were obtained.
The cross-sectional shape of the patterned PZT lines was trapezoidlike. Single
perovskite PZT grains that formed during annealing at 600–700 °C completely filled
the cross-sectional area of the patterned lines. Lead acetate, zirconium propoxide, and
titanium isopropoxide were used as the starting materials. Substrates used included
silver tape, stainless steel plate, silicon wafer, and platinum-coated silicon wafer.