@article{120891,
  author = {J. S. Vartuli and M. Ozenbas and C. M. Chun and M. Trau and I.A. Aksay},
  title = {Micropatterned lead zirconium titanate thin films},
  abstract = { Micropatterning of Pb(Zr<sub>0.52</sub>Ti<sub>0.48</sub>)O<sub>3</sub> (PZT) thin films with line features as small as<br>350 nm was demonstrated through capillary molding of organometallic solutions within<br>the continuous channels of an elastomeric mold. Despite the large stresses that develop<br>during the evaporation of the solvent, pyrolysis of the organics, and the densification<br>and crystallization of the inorganic gel, the patterned crystalline PZT films were<br>crack-free and mechanically robust. Flawless regions as large as 1 cm2 were obtained.<br>The cross-sectional shape of the patterned PZT lines was trapezoidlike. Single<br>perovskite PZT grains that formed during annealing at 600{\textendash}700 {\textdegree}C completely filled<br>the cross-sectional area of the patterned lines. Lead acetate, zirconium propoxide, and<br>titanium isopropoxide were used as the starting materials. Substrates used included<br>silver tape, stainless steel plate, silicon wafer, and platinum-coated silicon wafer. },
  year = {2003},
  journal = {Journal of Materials Research},
  volume = {18},
  pages = {1259-1265},
  month = {05/2003},
  isbn = {0884-2914},
  language = {eng},
}