Microchannel molding: A soft lithography-inspired approach to micrometer-scale patterning

Publication Year
2005

Type

Journal Article
Abstract
A new patterning technique for the deposition of sol-gels and chemical solution precursors was developed to address some of the limitations of soft lithography approaches. When using micromolding in capillaries to pattern precursors that exhibit large amounts of shrinkage during drying, topographical distortions develop. In place of patterning the elastomeric mold, the network of capillary channels was patterned directly into the substrate surface and an elastomer membrane is used to complete the channels. When the wetting properties of the substrate surfaces were carefully controlled using self-assembled monolayers (SAMs), lead zirconate titanate thin films with nearly rectangular cross-sections were successfully patterned. This technique, called microchannel molding (mu CM), also provided a method for aligning multiple layers such as bottom electrodes for device fabrication.
Journal
Journal of Materials Research
Volume
20
Pages
1995-2003
Date Published
08/2005
Type of Article
Article
ISBN
0884-2914
Accession Number
WOS:000231054800009